Preliminary study on improving resolution on mirror projection mask aligner with phase shift mask

Autor:	薛建设 Xue Jian-she, 郭建 Guo Jian, 惠官宝 Hui Guan-bao, 孙双 Sun Shuang, 黎午升 Li Wu-sheng, 崔承镇 Choi Seung-jin, 史大为 Shi Da-wei
Rok vydání:	2014
Předmět:	Physics Optics business.industry Signal Processing Resolution (electron density) Phase-shift mask Projection (set theory) business Instrumentation Electronic Optical and Magnetic Materials
Zdroj:	Chinese Journal of Liquid Crystals and Displays. 29:544-547
ISSN:	1007-2780
DOI:	10.3788/yjyxs20142904.0544
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9e6b0c2452d92ad88107d3b883129863 https://doi.org/10.3788/yjyxs20142904.0544 Zobrazit plný text záznamu