Hydrogen-free fluorinated DLC films with high hardness prepared by using T-shape filtered arc deposition system
| Autor: | Hirofumi Takikawa, Masao Kamiya, Tsuyoshi Tanimoto, Mikio Ito, Toru Harigai, Makoto Taki, Yushi Iijima, Shinsuke Kunitsugu, Takahiro Imai, Yoshiyuki Suda, Ryo Isono, Satoru Kaneko, Yushi Hasegawa |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science 02 engineering and technology Substrate (electronics) Nanoindentation 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films Contact angle Physical vapor deposition 0103 physical sciences Cathodic arc deposition Deposition (phase transition) Fluorocarbon Composite material 0210 nano-technology Instrumentation Elastic modulus |
| Zdroj: | Vacuum. 167:536-541 |
| ISSN: | 0042-207X |
| Popis: | Fluorinated diamond-like carbon (F-DLC) films have good surface properties. DLC films with high mechanical hardness are prepared using filtered arc deposition, which is a physical vapor deposition method. In this work, the fabrication of F-DLC films using filtered cathodic arc deposition while introducing a fluorocarbon gas was carried out, and the characteristics of the F-DLC films were investigated. The F-DLC films were deposited on Si and WC substrates using the T-shape filtered arc deposition (T-FAD) system while introducing fluorocarbon gases. The fluorocarbon gases used for this purpose were C3F8, C6F14, or C7F14. The F-DLC characteristics such as surface appearance, film structure, film density, nanoindentation hardness, substrate adhesion, and water contact angle were investigated. The characteristics of the fabricated DLC films were as follows: the fluorine content ranged from 0 to 22 at.%, film density ranged from 2.1 to 3.1 g/cm3, nanoindentation hardness ranged from 10 to 48 GPa, elastic modulus ranged from 140 to 360 GPa, and water contact angle ranged from 66 to 95°. In addition, the F-DLC films showed good adhesion strength on WC substrates. F-DLC films with high mechanical hardness and water repellency were obtained using T-FAD. |
| Databáze: | OpenAIRE |
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