Improved Uniformity of Reacted GaAs Contacts by Interface Mixing

Autor: M. J. Hollis, James W. Mayer, S. D. Mukherjee, Karen L. Kavanagh, C. J. Palmrøm
Rok vydání: 1984
Předmět:
Zdroj: MRS Proceedings. 37
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-37-473
Popis: Ion beam mixing is used to produce more uniform Au.Au-Ge and Au-Ge-Ni reacted contacts to GaAs.
Databáze: OpenAIRE