Improved Uniformity of Reacted GaAs Contacts by Interface Mixing
Autor: | M. J. Hollis, James W. Mayer, S. D. Mukherjee, Karen L. Kavanagh, C. J. Palmrøm |
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Rok vydání: | 1984 |
Předmět: | |
Zdroj: | MRS Proceedings. 37 |
ISSN: | 1946-4274 0272-9172 |
DOI: | 10.1557/proc-37-473 |
Popis: | Ion beam mixing is used to produce more uniform Au.Au-Ge and Au-Ge-Ni reacted contacts to GaAs. |
Databáze: | OpenAIRE |
Externí odkaz: |