| Autor: |
I.H. Wilson, S. Chereckdjian |
| Rok vydání: |
1984 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 1:258-264 |
| ISSN: |
0168-583X |
| DOI: |
10.1016/0168-583x(84)90078-8 |
| Popis: |
Evaporated aluminium films (typically 2500 A thick) were bombarded with a collimated beam of molecular oxygen ions at energies between 50 and 150 keV. Talystep measurements show a good correlation between the measured vertical surface expansion and that predicted for synthesis of Al 2 O 3 . Rutherford backscattering analysis was used to determine the oxygen profile and the aluminium/oxygen ratio. The oxygen concentration was found to increase with ion dose, in agreement with theory, until al 2 o 3 ) was formed. The formation of stoiehiometric Al 2 O 3 was confirmed by ESCA and transmission electron microscopy. The Al 2 O 3 layer was found to be polycrystalline. The double quartz resonator technique was used to observe the stress in the growing oxide. The stress was found to be compressive and to vary with ion dose and the depth profile of implanted oxygen. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
