Study on the Gas-Sensitive Effect of CdIn2O4 Thin Films

Autor:	Shengrui Jiang, Dongliang Peng, Liang Xie
Rok vydání:	1993
Předmět:	Chemistry Alloy Mineralogy engineering.material Condensed Matter Physics Electronic Optical and Magnetic Materials chemistry.chemical_compound Carbon film Chemical engineering Sputtering Ternary compound engineering Deposition (phase transition) Gas detector Thin film Electrical conductor
Zdroj:	Physica Status Solidi (a). 136:441-446
ISSN:	1521-396X 0031-8965
Popis:	Transparent and conductive CdIn2O4 (CIO) thin films are prepared by rf reactive sputtering from a Cd—In alloy target in Ar + O2 mixtures. The sensitivity of CdIn2O4 thin film sensors to the LP, CO, H2, and C2H5OH gas together with their mechanism were studied. The effects of the film deposition conditions to the gas-sensitive effect are also discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9e2c4b0dbcba826d39a2cf7680677d47 https://doi.org/10.1002/pssa.2211360217 Zobrazit plný text záznamu Plný text