Development of a two-step stylus with elastic hinge for microstructure measurement to improve sensitivity and vibration characteristics
| Autor: | Hiroshi Murakami, Hiroki Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Precision Engineering. 80:72-81 |
| ISSN: | 0141-6359 |
| DOI: | 10.1016/j.precisioneng.2022.11.015 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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