Performance of a ZrO2 PEALD Dielectric for 45nm Embedded DRAM 3D MIM (Metal-Insulator-Metal) Stacked Capacitors

Autor:	Caillat, Christian, Berthelot, Audrey, Del-Puppo, Helene, Deloffre, Emilie, Emonet, Nicolas, B. Icard, Gros-Jean, Mickael, Barnola, Sebastien, C. Soonekindt, Pantel, Roland, Lalanne, Frederic
Rok vydání:	2007
DOI:	10.13140/2.1.3668.9285
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9e19d625a41ab17bc758558a72d79d77 Zobrazit plný text záznamu