| Autor: |
Yun Hwei Shen, Sheng Lung Tu, Dah Tong Ray, Yu Chun Wu, Tao Hsing Chen, Yen Hsun Su |
| Rok vydání: |
2013 |
| Předmět: |
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| Zdroj: |
Applied Mechanics and Materials. :50-54 |
| ISSN: |
1662-7482 |
| DOI: |
10.4028/www.scientific.net/amm.479-480.50 |
| Popis: |
In this study, nano-titanium films of different thickness were deposited. By adjusting it is found that when the thickness of the titanium films was in the nano-scale, the electric resistivity of the titanium films decreased. Furthermore, the deposited titanium was transformed into titanium oxide by maintain an oxygen atmosphere and using a rapid annealing furnace during sputtering. When oxidized nano titanium film is sputtered on a low-electric-resistive metal thin film, the photo-electronic properties of Nano-thin film will be enhanced. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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