Microelectromechanical accelerometer under mechanical impact conditions

Autor: Tamara Nesterenko, A N Koleda, E S Barbin, E. V. Zorina
Rok vydání: 2016
Předmět:
Zdroj: 2016 International Siberian Conference on Control and Communications (SIBCON).
DOI: 10.1109/sibcon.2016.7491845
Popis: The paper presents the effect of mechanical impact on the multiple-axis microelectromechanical system (MEMS) accelerometer. The parameters of accelerometer and its impact load allow considering the impact to be long and displacements induced by this impact to be quasi-static. The impact load results in a contact interaction between the movable and stationary elements of the structure. To prevent the contact interaction, the limit stops are installed in accelerometer. Investigations are carried out using the ANSYS finite element program and MATLAB/Simulink support package. Investigation results are achieved for the displacement and stress values of accelerometer.
Databáze: OpenAIRE