Impurity Measurement in Specialty Gases Using Atmospheric Pressure Ionization Mass Spectrometer with Two Compartments Ion Source

Autor:	Tadahiro Ohmi, Atsushi Ohki, Masafumi Kitano, Yasuyuki Shirai
Rok vydání:	2000
Předmět:	Materials science Atmospheric pressure Spectrometer Impurity Analytical chemistry Atomic physics Ionization mass Ion source
Zdroj:	Extended Abstracts of the 2000 International Conference on Solid State Devices and Materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9dcb7b64e36e383a8fb02793a2eba008 https://doi.org/10.7567/ssdm.2000.a-6-5 Zobrazit plný text záznamu