Formation of P3 scribes in CIGS solar cells with nanosecond and picosecond pulses

Autor: Gediminas Račiukaitis, Paulius Gečys, Edgaras Markauskas, Laimis Zubauskas
Rok vydání: 2021
Předmět:
Zdroj: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI.
DOI: 10.1117/12.2574971
Popis: In this study, we demonstrate that the P3 scribing of CIGS cells with nanosecond pulses can compete with ultrashort picosecond pulses producing very low conductivity isolation scribes. The investigation covered a wide range of laser wavelengths – from 355 nm to 2.5 µm. Additionally, P3 processing with extremely high speeds (up to 25 m/s) was investigated in CIGS cells. Results showed that heat accumulation effects occurred even in low-pulse-overlap removal of TCO layers (lift-off). Furthermore, processing at highest speeds demonstrated the deteriorated quality of P3 scribes due to ejected TCO flakes partially shielding the laser beam. Nevertheless, scribe conductivity remained low.
Databáze: OpenAIRE