Fabrication of field-effect transistors based on Fe3+-doped titania by sol–gel methods

Autor: Leo Chau-Kuang Liau, Wen-Wei Chou
Rok vydání: 2009
Předmět:
Zdroj: Semiconductor Science and Technology. 24:055007
ISSN: 1361-6641
0268-1242
DOI: 10.1088/0268-1242/24/5/055007
Popis: TiO2-based field-effect transistors (FETs) were designed and fabricated using nano-TiO2 and Fe3+-doped TiO2 samples prepared by sol–gel methods. Homo-junction characteristics of nano-TiO2/Fe3+-doped TiO2 films, which perform as a semiconductor diode, were analyzed by current–voltage (I–V) data. Two designs of the metal–semiconductor field effect transistors (MESFETs), back and front gate cases, were fabricated and characterized by I–V measurements. The FET devices were evaluated by analyzing the data of source-drain current versus voltage (Ids–Vds) which are controlled by the gate voltage (Vg). In addition, the effects of the junction diode behavior on the transistor were discussed according to the energy band diagrams of TiO2 and Fe3+-doped TiO2 semiconductors.
Databáze: OpenAIRE