Design of electronic sections for nano-displacement measuring system

Autor:	Zahra Dashtban, Samaneh Hamedi, Saeed Olyaee
Rok vydání:	2010
Předmět:	Materials science business.industry Amplifier Base (geometry) Measure (physics) Integrated circuit Displacement (vector) Electronic Optical and Magnetic Materials law.invention Interferometry Optics law Nano Wafer Electrical and Electronic Engineering business
Zdroj:	Frontiers of Optoelectronics in China. 3:376-381
ISSN:	1674-4594 1674-4128
Popis:	Noncontact displacement measurement is generally based on the interferometry method. In the semiconductor industry, a technique for measuring small features is required as circuit integration becomes denser and the wafer size becomes larger. An interferometric system known as a three-longitudinal-mode heterodyne interferometer (TLMI) is made of two main parts: optical setup and electronic sections. In the optical part, the base and measurement signals having 500-MHz frequency are produced, resulting from interfering three longitudinal modes. The secondary beat frequency to measure the displacement in the TLMI is about 300 kHz. To extract the secondary beat frequency, wide-band amplifiers, doublebalanced mixers (DBMs), band-pass filters (BPFs), and low-pass filters (LPFs) are used. In this paper, we design the integrated circuit of a super-heterodyne interferometer with total gain of 56.9 dB in size of 1030 μm×1030 μm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9d50a07bc57ea6857f3fe353827bf51b https://doi.org/10.1007/s12200-010-0112-y Zobrazit plný text záznamu Full text from SpringerLink