High-temperature instrumented microscale compression molding of Pb

Autor: Wen Jin Meng, D. M. Cao, Kevin W. Kelly
Rok vydání: 2004
Předmět:
Zdroj: Microsystem Technologies. 10:323-328
ISSN: 1432-1858
0946-7076
DOI: 10.1007/s00542-003-0333-8
Popis: Compression molding of Pb plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni microscale mold inserts was carried out in the temperature range of 100–300 °C. In-situ measurements of compressive molding force, demolding friction force and insert displacement were carried out with a custom-built, high-vacuum, high-temperature, instrumented molding machine. Microscale features generated on Pb plates and insert condition after repeated molding runs were examined. The in-situ force monitoring capability enabled compressive stresses needed for molding and frictional stresses generated by demolding to be measured as a function of temperature. Our results demonstrate that, in cases where no significant metal/insert chemical interactions exist, present LiGA fabricated Ni inserts possess adequate mechanical properties for repeated micromolding of low melting temperature metals.
Databáze: OpenAIRE