A study for an aluminum electro-thermally actuated U-shaped microtweezer
| Autor: | Marius Pustan, Corina Birleanu, A. Cismaru, R. Gavrila, C. Romanitan, O. Tutunaru, Rodica-Cristina Voicu |
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| Rok vydání: | 2020 |
| Předmět: |
Diffraction
Microelectromechanical systems Materials science Fabrication Structural material Scanning electron microscope chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology Characterization (materials science) Surface micromachining 020210 optoelectronics & photonics chemistry Aluminium 0202 electrical engineering electronic engineering information engineering Composite material 0210 nano-technology |
| Zdroj: | IOP Conference Series: Materials Science and Engineering. 724:012053 |
| ISSN: | 1757-899X 1757-8981 |
| DOI: | 10.1088/1757-899x/724/1/012053 |
| Popis: | In this paper we present the investigations of two aluminium layers with different thicknesses in order to be used for manufacturing of MEMS and the design, simulation, fabrication and characterizations of a microtweezer designated for micromanipulation applications. Electro-thermo-mechanical finite-element simulations were performed in order to describe the behaviour of MEMS devices. The microtweezers have been fabricated in aluminium, as structural material, by surface micromachining processes. Different characterizations of the structural material by Atomic Force Microscope (AFM), X-ray Diffraction System (XRD) and Scanning Electron Microscopy (SEM) characterization tools were presented. |
| Databáze: | OpenAIRE |
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