Simulation-based Performance Assessment of Tool Requalification Strategies in Wafer Fabs
| Autor: | Marcel Stehli, Detlef Pabst, Denny Kopp, Lars Mönch |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
0209 industrial biotechnology
021103 operations research Computer science 0211 other engineering and technologies ComputerApplications_COMPUTERSINOTHERSYSTEMS 02 engineering and technology Reliability engineering Cycle time 020901 industrial engineering & automation Semiconductor wafer fabrication Wafer Stepper Rolling horizon Throughput (business) Simulation based |
| Zdroj: | CASE |
| Popis: | In this paper, we discuss requalification strategies for stepper tools in semiconductor wafer fabrication facilities (wafer fabs). Before processing lots on steppers, the steppers have to be qualified. A mathematical programming formulation is used periodically to determine appropriate qualification plans. These plans will be implemented at the shop-floor. During consecutive planning epochs, certain already established qualifications of steppers can be canceled, for instance, due to stepper breakdowns. We study the performance of several requalification strategies in this situation. Therefore, we use a discrete-event simulation framework that allows for applying the mathematical programming formulation in a rolling horizon manner and for performing the requalification strategies while the production is executed in the simulation. We demonstrate by designed simulation experiments that some of the proposed strategies perform well with respect to throughput and cycle time while requiring only a low additional qualification effort. |
| Databáze: | OpenAIRE |
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