Ferroelectric LiTaO3 thin film annealed in an electric field
| Autor: | M. Kosec, B. B. Lavrenčič, B. Žigon, A. Kandušer, Dj. Mandrino, Peter Panjan |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Materials science
Silicon Analytical chemistry chemistry.chemical_element Condensed Matter Physics Ferroelectricity Electronic Optical and Magnetic Materials Amorphous solid Monocrystalline silicon Carbon film chemistry Control and Systems Engineering Sputtering Electric field Materials Chemistry Ceramics and Composites Electrical and Electronic Engineering Thin film Composite material |
| Zdroj: | Integrated Ferroelectrics. 4:13-19 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584589408018655 |
| Popis: | LiTaO3 thin film from have been obtained by RF-magnetron sputtering from monocrystalline target. The films have been deposited on (111) silicon and platinum without substrate heating. The amorphous films were subsequently annealed in the electric field. The morphology, crystal structure and composition of the films were investigated by means of XRD, SEM and AES spectroscopies. The influence of the annealing treatment in the electric field on the morphology and crystal structure of films is significant. The films grown in this fashion are preferentially oriented with the c-axis perpendicular to the surface of substrates and stoichiometric. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|