In Situ Phosphorus Doping of Germanium by APCVD
| Autor: | Gabriela DILLIWAY, Ruud van den BOOM, Renaud Bonzom, Frederik Leys, Benny Van Daele, Brigitte PARMENTIER, Trudo CLARYSSE, Eddy R. Simoen, Roger Loo, Marc M. Meuris, Wilfried Vandervorst, Matty R. Caymax |
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| Rok vydání: | 2006 |
| Zdroj: | ECS Meeting Abstracts. :1464-1464 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2006-02/31/1464 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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