A New Formula for Energy Spectrum of Sputtered Atoms Due to Low-Energy Light Ions

Autor: T. Kawamura, Takahiro Kenmotsu, Yasunori Yamamura, T. Ono
Rok vydání: 2004
Předmět:
Zdroj: Journal of Plasma and Fusion Research. 80:406-409
ISSN: 0918-7928
DOI: 10.1585/jspf.80.406
Popis: A new formula has been derived to describe the energy spectrum of sputtered atoms from a target material bombarded by light ions. We assume that sputtered atoms bombarded by low-energy light ions are mainly primary knock-on atoms which are created by large-angle backscattered light ions. The escape processes of recoil atoms are estimated on the basis of the Falcone-Sigmund model. The new formula has the dependence on the incident energy of a projectile. We have compared the new formula with simulation results calculated with ACAT code for a Fe target material bombarded by 50 eV, 100 eV and 500 eV D + ions. Good agreements are found for 50 eV and100 eV D + ions.
Databáze: OpenAIRE