Chip-Level Active Temperature Control for Improving Temperature Robust of a Micro-Gyroscope

Autor:	Xing Hua Wang, Zhihua Chen, Le Le Liu, Hong Juan Cui, Ding Bang Xiao
Rok vydání:	2015
Předmět:	Engineering Temperature control Silicon business.industry Mechanical Engineering TEC Thermistor chemistry.chemical_element Gyroscope Chip law.invention Internal temperature chemistry Mechanics of Materials law Electronic engineering Optoelectronics General Materials Science business
Zdroj:	Key Engineering Materials. :600-604
ISSN:	1662-9795
Popis:	Silicon micro-fabricated gyroscope are very sensitive to ambient temperature, this paper conducted a novel active temperature controlling system. Combined with the PTC thermistor to detect internal temperature and the inserted TEC to control the temperature, encapsulation condition inside the gyroscope was kept in a stable situation. Experimental results showed that it greatly improved the performance of the micro-gyroscope.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9cd618b093dff3bcc210c2a9a6e8c758 https://doi.org/10.4028/www.scientific.net/kem.645-646.600 Zobrazit plný text záznamu