Structure of neutron-induced defect clusters in GaAs MESFETs

Autor: E. V. Kiseleva, S. V. Obolenskii
Rok vydání: 2006
Předmět:
Zdroj: Russian Microelectronics. 35:322-328
ISSN: 1608-3415
1063-7397
DOI: 10.1134/s1063739706050076
Popis: A method is proposed for the structural investigation of defect clusters produced by neutron irradiation of semiconductors. It involves simulation of defect formation and analysis of the distribution of point defects within individual clusters. The method enables one to characterize point-defect aggregations in a cluster in terms of size, separation, and arrangement. It could be applied to advanced devices based on a nanoscale heterostructure.
Databáze: OpenAIRE