Hybrid polymer sol–gel material for UV-nanoimprint: microstructure and thermal densification

Autor: Franziska Back, Peer Löbmann, Matthias Bockmeyer, Eveline Rudigier-Voigt
Rok vydání: 2013
Předmět:
Zdroj: Journal of Sol-Gel Science and Technology. 66:73-83
ISSN: 1573-4846
0928-0707
Popis: Hybrid polymer solutions suitable for UV-nanoimprint were synthesized by combination of an alkoxysilane binder mixture with silica nanoparticles. Hydrolysis and condensation reactions were monitored by NMR and viscosity measurements. Thereby long-term stable systems were produced as a prerequisite for industrial application. Dip-coating of glass substrates and subsequent UV-curing yielded thin films. Their thermal densification and microstructural evolution resulted in pure glassy porous coatings, which were in detail characterized by N2-sorption measurements and ellipsometric porosimetry. Results emphasize the importance of the binder-particle interaction within these materials that are destined for the fabrication of microstructured surfaces by cost efficient and industrially feasible UV-based soft lithography. Structured glassy layers with high inorganic content show thermal stability up to >500 °C and have a high structure accuracy >85 %.
Databáze: OpenAIRE