Profile Online Detection for Two-Dimensional Stage x Axis Mirror in Scanning Exposure Systems

Autor:	李文昊 Li Wenhao, 宋莹 Song Ying, 巴音贺希格 Bayanheshig, 刘兆武 Liu Zhao-wu, 李晓天 Li Xiaotian, 姜珊 Jiang Shan, 吕强 Lü Qiang
Rok vydání:	2017
Předmět:	Physics Optics business.industry Computer vision Stage (hydrology) Artificial intelligence Electrical and Electronic Engineering business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Chinese Journal of Lasers. 44:0104004
ISSN:	0258-7025
DOI:	10.3788/cjl201744.0104004
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9ca41878ac118ed7b1d7ca233a4f6ace https://doi.org/10.3788/cjl201744.0104004 Zobrazit plný text záznamu