Simultaneous Measurement of Film Thickness and Surface Profile of Film-covered Objects by Monochromatic Light Interferometry

Autor:	Takuto Naito, Akihiro Nakanowatari, Katsuichi Kitagawa, Hidemitsu Ogawa, Masashi Sugiyama
Rok vydání:	2009
Předmět:	Surface (mathematics) Interferometry White light interferometry Optics Materials science Phase shifting interferometry business.industry Electronic speckle pattern interferometry Monochromatic color business
Zdroj:	Transactions of the Society of Instrument and Control Engineers. 45:73-82
ISSN:	1883-8189 0453-4654
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9c95fbdf46bf234e461001d6bde2ba50 https://doi.org/10.9746/sicetr.45.73 Zobrazit plný text záznamu