Investigation of the effect of multiple oxidation and ion sputtering on the formation of inhomogeneous oxide layers on the surface of an ultrathin metal film

Autor:	Alexandr V. Lubenchenko, Dmitry A. Ivanov, Denis S. Lukiantsev, Mikhail B. Smirnov, Oleg N. Pavlov
Rok vydání:	2023
Zdroj:	2023 5th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9c94cfd624c68022014fd69959240215 https://doi.org/10.1109/reepe57272.2023.10086730 Zobrazit plný text záznamu