First-order periodic error correction: validation for constant and non-constant velocities with variable error magnitudes

Autor:	David C. Chu, Tony L. Schmitz, Lonnie Houck
Rok vydání:	2006
Předmět:	Heterodyne business.industry Applied Mathematics Mathematical analysis Michelson interferometer Waveplate Displacement (vector) law.invention Nonlinear system Interferometry Optics law Range (statistics) business Constant (mathematics) Instrumentation Engineering (miscellaneous) Mathematics
Zdroj:	Measurement Science and Technology. 17:3195-3203
ISSN:	1361-6501 0957-0233
DOI:	10.1088/0957-0233/17/12/001
Popis:	This paper provides experimental validation of the real-time, digital first-order periodic error reduction scheme described by Chu and Ray. Measurements are completed using a single-pass, heterodyne Michelson interferometer designed to minimize common error contributors such as dead path, Abbe and environment. Motion generation over a range of velocities is achieved using an air bearing stage. Periodic error magnitude and type is varied through independent rotations of a half wave plate and polarizer located in the measurement path; experimental magnitudes for constant velocity conditions are compared to the analytical model described by Cosijns et al. It is shown that the correction algorithm can successfully attenuate first-order error, and identify other error orders, to sub-nm levels for a wide range of frequency mixing conditions and constant/non-constant velocity profiles.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9c5ed22112d2b55cb888bfc56a91eba1 https://doi.org/10.1088/0957-0233/17/12/001 Zobrazit plný text záznamu