Impact of pFET channel formation and patterning on the strain in SiGe nanosheets investigated by µRaman spectroscopy

Autor:	L. Gaben, R. Berthelon, F. Andrieu, D. Rouchon, D. Dutartre, F. Roze, M. Vinet
Rok vydání:	2018
Předmět:	Materials science Strain (chemistry) business.industry Optoelectronics Channel (broadcasting) business Spectroscopy
Zdroj:	Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9c591225a5ce1c358c0b8e0f57c40662 https://doi.org/10.7567/ssdm.2018.c-3-02 Zobrazit plný text záznamu