Microwave characterization of YBa2Cu3O7−x thin films grownin situ by Off-axis magnetron sputtering

Autor:	M. Ambrico, N. Sparvieri, A. M. Fiorello, L. Marescialli
Rok vydání:	1994
Předmět:	Superconductivity Materials science Carbon film business.industry Sputtering General Physics and Astronomy Optoelectronics Thin film Sputter deposition High-power impulse magnetron sputtering business Sheet resistance Microwave
Zdroj:	Il Nuovo Cimento D. 16:2005-2010
ISSN:	1826-9893 0392-6737
Popis:	Superconducting films of YBa2Cu3O7−x were depositedin situ on LaAlO3 substrates using single-target 90° off-axis sputtering. The obtained films have tipicalT c values of 91K. Surface resistance measurements on as-grown films reach 1.1 mΩ at 77K and 10GHz; whilst on ion-etched patterned resonant linesR s (77K, 10GHz) it is about 10mΩ.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9c0fb24b1a5d49c215d5b003ebddf1ee https://doi.org/10.1007/bf02471859 Zobrazit plný text záznamu Full text from SpringerLink