Modelling Propagation Loss of PECVD Silicon Nitride Strip Waveguides: Evaluation andAssessment of Width Dependency
| Autor: | Omar Basso, Deborah Morecroft, Jochen Kraft, Anton Buchberger, Alexander Bergmann, Jozef Pulko |
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| Rok vydání: | 2021 |
| Předmět: |
Waveguide lasers
Dependency (UML) Materials science business.industry Physics::Optics Chemical vapor deposition STRIPS law.invention Condensed Matter::Materials Science Wavelength chemistry.chemical_compound Silicon nitride chemistry Plasma-enhanced chemical vapor deposition law Optoelectronics business Effective refractive index |
| Zdroj: | Conference on Lasers and Electro-Optics. |
| Popis: | Measurements of the width-dependent propagation loss of 250 nm thick silicon nitride strip waveguides at 850 nm wavelength indicate good agreement with the theoretical model. The waveguides were fabricated by plasma-enhanced chemical vapor deposition (PECVD). |
| Databáze: | OpenAIRE |
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