Mechanical Conversion for High-Throughput TEM Sample Preparation

Autor:	Lyudmila Zaykova-Feldman, Anthony B Kendrick, Thomas M. Moore
Rok vydání:	2006
Předmět:	History Materials science Process control Sample preparation Nanotechnology Mechanical press Composite material Throughput (business) Sample (graphics) Rod Computer Science Applications Education Characterization (materials science)
Zdroj:	Journal of Physics: Conference Series. 26:227-230
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/26/1/054
Popis:	This paper presents a novel method of direct mechanical conversion from lift-out sample to TEM sample holder. The lift-out sample is prepared in the FIB using the in-situ liftout Total Release™ method. The mechanical conversion is conducted using a mechanical press and one of a variety of TEM coupons, including coupons for both top-side and back-side thinning. The press joins a probe tip point with attached TEM sample to the sample coupon and separates the complete assembly as a 3mm diameter TEM grid, compatible with commercially available TEM sample holder rods. This mechanical conversion process lends itself well to the high through-put requirements of in-line process control and to materials characterization labs where instrument utilization and sample security are critically important.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9bd7fb75121fbf7d90854fad17a44f1b https://doi.org/10.1088/1742-6596/26/1/054 Zobrazit plný text záznamu