Building blocks of past, present and future BCD technologies

Autor: Patrick Cao Li, Pirooz Parvarandeh, Francois Hebert, Jeoung Mo Koo, Ming Li, Guowei Zhang
Rok vydání: 2021
Předmět:
Zdroj: 2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD).
DOI: 10.23919/ispsd50666.2021.9452276
Popis: The critical building blocks that have enabled high-performance and high-reliability BCD technologies optimized for power management applications over the past 30 years are identified. These building blocks, which include process modules, equipment, measurement tools and devices, have been developed many decades ago and continue to enable new and improved technologies. In this report the significant impact of these building blocks on the industry’s BCD technology roadmap and performance is discussed.
Databáze: OpenAIRE