Local Lattice Parameter Determination of Strained Areas of Semiconductors Using CBED

Autor:	Kenji Tsuda, Michiyoshi Tanaka, Takayuki Akaogi, Masami Terauchi
Rok vydání:	2004
Předmět:	Crystallography Lattice constant Semiconductor Materials science Condensed matter physics business.industry business Instrumentation
Zdroj:	Microscopy and Microanalysis. 10:310-311
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927604883727
Popis:	Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9bcb58cbbc790c77a336713129e12cd4 https://doi.org/10.1017/s1431927604883727 Zobrazit plný text záznamu