Improved thermal U-beam actuators for micro-assembly
| Autor: | Pasqualina M. Sarro, Marcel Tichem, Vincent Adrianus Henneken |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Optical fiber Laser diode Metals and Alloys Mechanical engineering Condensed Matter Physics Chip Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Characterization (materials science) Microactuator law Thermal Electronic engineering Electrical and Electronic Engineering Actuator Instrumentation Beam (structure) |
| Zdroj: | Sensors and Actuators A: Physical. 142:298-305 |
| ISSN: | 0924-4247 |
| Popis: | The paper describes the performance characterization results of an improved U-beam thermal microactuator design compared to a more conventional U-beam structure having similar dimensions. These microactuators are developed for lateral positioning of a single-mode optical fibre to a laser diode chip. This development is part of a feasibility study of an alternative method of performing micro-assembly tasks, i.e. using product internal assembly functions. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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