A low‐cost induction power supply for substrate heating

Autor:	L. G. Meiners, B. T. Hemmelman
Rok vydání:	1993
Předmět:	Induction heating Materials science law Power electronics Transistor Mechanical engineering Power semiconductor device Field-effect transistor Chemical vapor deposition Chemical reactor Instrumentation Susceptor law.invention
Zdroj:	Review of Scientific Instruments. 64:1296-1303
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1144083
Popis:	The design and construction of a 1‐kW induction heating supply is described. The system was optimized for applications in which the power is coupled into a graphite susceptor which is the substrate holder for samples placed in the reaction chamber of a chemical vapor deposition system. The supply draws power from a 120‐V, 20‐A service outlet and delivers a 10‐kHz output which is proportional to the magnitude of a 0–5 Vdc control signal. Presently available power n‐metal‐oxide‐semiconductor field‐effect transistors permit the construction of a compact unit which is small enough to be installed inside of a deposition cabinet.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9b4b8dabbf45075e14b8399901f44db9 https://doi.org/10.1063/1.1144083 Zobrazit plný text záznamu