Thermophoretic control of building units in the plasma-assisted deposition of nanostructured carbon films
| Autor: | Ken Ostrikov, Shuyan Xu, P.P. Rutkevych, Sergey V. Vladimirov |
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| Rok vydání: | 2004 |
| Předmět: | |
| Zdroj: | Journal of Applied Physics. 96:4421-4428 |
| ISSN: | 1089-7550 0021-8979 |
| Popis: | The possibility of the thermophoretic control of the plasma-grown building units in the plasma-assisted deposition of various carbon-based nanostructures on Ni-based catalyzed Si substrates is reported. It is experimentally demonstrated that varying the near-substrate temperature gradient, one can selectively deposit or levitate the carbon-based nanoparticles grown in the low-temperature reactive plasmas of Ar+H2+CH4 gas mixtures. When the nanoparticles are levitated in the plasma presheath, the arrays of vertically aligned carbon nanotips are assembled, whereas the enhanced deposition of the building units from the gas phase favors the formation of polymorphous nanostructured carbon films. The experimental observations are supported by the one-dimensional model of the nanoparticle dynamics in the near-electrode area. It is shown that the thermophoretic force is indeed a crucial factor that controls the deposition of the plasma-grown fine particles. The experimental and computation results suggest that it... |
| Databáze: | OpenAIRE |
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