Development of a Micro-Optical Distance Sensor with Electrical I/O Interface

Autor:	Jürgen Mohr, Akihide Shiratsuki, Toru Oka, Ulrike Wallrabe, Hajime Nakajima, Peter Krippner, Uwe Hollenbach, Masahiro Tsugai
Rok vydání:	2001
Předmět:	Materials science Machining Interface (computing) Miniaturization Mechanical engineering Triangulation (social science) Development (differential geometry) LIGA Optical path length
Zdroj:	Transducers ’01 Eurosensors XV ISBN: 9783540421504
DOI:	10.1007/978-3-642-59497-7_127
Popis:	A micro-optical distance sensor has been developed by a combination of LIGA technology and Si micro machining in order to meet industrial demands for miniaturization. The function of the distance sensor is based on the triangulation principle.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9b28fbef9bca220b7366d18b86fc9dae https://doi.org/10.1007/978-3-642-59497-7_127 Zobrazit plný text záznamu