Opto-electronic properties of different black silicon structures passivated by thermal ALD deposited Al2O3

Autor: Martin Otto, Matthias Kroll, Thomas Käsebier, Benjamin Gesemann, Ralf B. Wehrspohn, Johannes Ziegler, Kevin Füchsel, Xiaopeng Li, Alexander Sprafke
Rok vydání: 2013
Předmět:
Zdroj: Renewable Energy and the Environment.
Popis: Black silicon (b-Si) structures offer improved light absorption but require appropiate surface passivation for photovoltaic applications. Here, we compare the opto-electronic performance of different wet and dry etched b-Si structures passivated by thermal ALD deposited Al2O3.
Databáze: OpenAIRE