Deposition of Fe81B13.5Si3.5C2films by excimer laser ablation and their structural investigation

Autor: T J Jackson, I Bibicu, M S Rogalski, S B Palmer
Rok vydání: 1994
Předmět:
Zdroj: Journal of Physics D: Applied Physics. 27:2167-2170
ISSN: 1361-6463
0022-3727
DOI: 10.1088/0022-3727/27/10/027
Popis: Laser-ablation deposition of films with nominal composition Fe81B13.5Si3.5C2 from targets of Metglass 2605SC ribbons onto room temperature substrates in vacuum is reported. It is found that the density of droplets on the surface of the film is controlled mainly by variation of the laser pulse energy. Scanning electron microscopy and energy-dispersive x-ray analyses indicate that the films are ablated as stoichiometric phases. X-ray diffraction and conversion electron Mossbauer spectra show a line broadening of the amorphous pattern compatible with a decrease in average grain size compared with the ribbon target. Analysis of the hyperfine field distribution at Fe sites indicates a 23% content in nano-sized particles in the ablated films, with the particles having an estimated average grain size of about 15 nm.
Databáze: OpenAIRE