Electrolyte-oxide-semiconductor structures as pH sensors based on resistive-switching characteristic
| Autor: | Huichao Wang, Zhuojie Chen, W.G. Wu, Xu-Dong Chen |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science business.industry Sensing applications 010401 analytical chemistry Analytical chemistry Electrolyte 01 natural sciences 0104 chemical sciences Oxide semiconductor Sensor array Resistive switching 0103 physical sciences Ph sensing Optoelectronics Sensitivity (control systems) business Electrical conductor |
| Zdroj: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/memsys.2016.7421775 |
| Popis: | An electrolyte-oxide-semiconductor (EOS) structure is reported as a pH sensor in this paper, which provides a new method of pH sensing based on the resistive-switching characteristic for the first time. The concept of conductive filaments is introduced for EOS structures to explain their resistive-switching property. We find that the threshold-voltage shift in the C-V and I-V curves approximately linearly increases with the augment of electrolyte solution's pH value from 1 to 12, showing a linear sensitivity about 46.3 mV/pH. The easily fabricated EOS sensor array could provide multiple and synchronic measurements. The different reverse leakage-current phenomena of EOS sensors with different electrolytes might broaden chemical sensing applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|