Surface functionalization of silicon micropillars spin-coated with Er-doped YSO silicate nanoparticles

Autor:	J.H. Shin, Heeyoung Go, Kiseok Suh
Rok vydání:	2007
Předmět:	Spin coating Materials science Photoluminescence Silicon business.industry Doping chemistry.chemical_element Nanotechnology Porous silicon Silicate chemistry.chemical_compound Hydrofluoric acid chemistry Etching (microfabrication) Optoelectronics business
Zdroj:	2007 Conference on Lasers and Electro-Optics - Pacific Rim.
DOI:	10.1109/cleopr.2007.4391352
Popis:	Optically active and electrically excitable silicon pillar structure is fabricated by electrochemical etching method. Silicon pillars structure is made by etching porous silicon layers in hydrofluoric acid-based solution. Afterwards, silicon pillars that are spin-coated with Er silicate show strong Er-related 1.53 mum photo luminescence.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9acdf4093fed047d1aaaba037d197417 https://doi.org/10.1109/cleopr.2007.4391352 Zobrazit plný text záznamu