Design of an Ultra-High Resolution SEM for Enhanced Analysis

Autor:	Jan Polster, Miloslav Havelka, Jaroslav Jiruše
Rok vydání:	2016
Předmět:	010302 applied physics Materials science business.industry 0103 physical sciences Optoelectronics 02 engineering and technology 021001 nanoscience & nanotechnology 0210 nano-technology business Ultra high resolution 01 natural sciences Instrumentation
Zdroj:	Microscopy and Microanalysis. 22:578-579
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927616003743
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9a92574787d03373a4907a88e1351c3c https://doi.org/10.1017/s1431927616003743 Zobrazit plný text záznamu