Defect detection in LiNbO3crystals using cross Nicol optical system with heating function
Autor: | Hajime Shimizu, Koichi Arishima, Haruki Kozawaguchi, Yasushi Hoshino |
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Rok vydání: | 2017 |
Předmět: | |
Zdroj: | Japanese Journal of Applied Physics. 56:078001 |
ISSN: | 1347-4065 0021-4922 |
DOI: | 10.7567/jjap.56.078001 |
Popis: | LiNbO3 crystals are important for applications such as optical devices and surface acoustic wave filters. However, defects in such crystals can negatively affect device characteristics. Consequently, control of defects is important during device manufacturing. In this study, a new defect detection method using a cross Nicol optical system with a heating function and defect image enhancement is proposed. Experiments confirmed that defects detected by this method correspond to those imaged by X-ray topography. It was found that additional defects are formed by charge induced during heating. |
Databáze: | OpenAIRE |
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