Laser micromachining of polymer waveguides for low cost passive alignment to VCSELs

Autor:	Warren Hale Lewis, John R. Rowlette, Jared D. Stack, M. Kadar Kallen
Rok vydání:	2002
Předmět:	Coupling Materials science business.industry Laser beam machining Physics::Optics Statistical model Semiconductor laser theory law.invention Vertical-cavity surface-emitting laser Surface micromachining Optics Pedestal law Optoelectronics business Waveguide
Zdroj:	Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society.
DOI:	10.1109/leos.1996.571605
Popis:	We developed a statistical model of the passive alignment process. This model allows us to calculate the distribution of VCSEL to waveguide alignment tolerances for laser micromachining of the waveguide and pedestal alignment features. Using this distribution as input for the optical model, the distribution of optical coupling efficiencies for the packaging tolerances was calculated. The coupling efficiencies for the passively aligned waveguides to the VCSEL array sources were measured and compared to the simulation results.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9a8a299e90b58b50a268615462057839 https://doi.org/10.1109/leos.1996.571605 Zobrazit plný text záznamu