Epitaxy of ternary nitrides on GaN single crystals

Autor: C. Kirchner, M. Boćkowski, Pawel Prystawko, Tadeusz Suski, Markus Kamp, Henryk Teisseyre, A. Śliwinski, M Schauler, J. Z. Domagala, S. Porowski, Michał Leszczyński, A Pelzmann
Rok vydání: 1999
Předmět:
Zdroj: Journal of Crystal Growth. :1061-1065
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(98)01004-5
Popis: InxGa1−xN and AlxGa1−xN layers were grown by metalorganic chemical vapour deposition (MOCVD) on highly conductive single crystals of GaN. The samples were then examined using X-ray diffraction and photoluminescence. It was found that there is a substantial difference in properties between the layers grown on the N-face (00.{ 1 }), chemically active, and Ga-face (00.1), chemically inert, sides. The latter layers had smaller free-electron concentration, better crystallographic quality and different chemical compositions. All the examined layers were fully strained, even for 1.1% lattice mismatch between the GaN substrate and about 0.1 μm thick In0.11Ga0.88N layer. The half-widths of the photoluminesce (PL) dominant peaks correspond to the compositional gradients observed in X-ray diffraction. The positions of the PL peaks agree with the X-ray data if bowing parameters of 3.2 eV for InGaN layers and 0.25 eV for AlGaN layers were used.
Databáze: OpenAIRE