Investigation on the Effect of Direct Current and Integrated Pulsed Electrochemical Etching of n-Type (100) Silicon

Autor:	Aslina Abu Bakar, Y. Yusuf, F. Zulkifli, Alhan Farhanah Abd Rahim, Ainorkhilah Mahmood, N. S. M. Razali, Rosfariza Radzali
Rok vydání:	2019
Předmět:	Materials science Silicon chemistry business.industry Direct current General Physics and Astronomy Optoelectronics chemistry.chemical_element Electrochemical etching business
Zdroj:	Acta Physica Polonica A. 135:697-701
ISSN:	0587-4246 1898-794X
DOI:	10.12693/aphyspola.135.697
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9a0e194d0f1d651db22dfc0879e69ce3 https://doi.org/10.12693/aphyspola.135.697 Zobrazit plný text záznamu Plný text ve formátu PDF