ZnO-Based Transparent Conductive Layers Obtained by the Magnetron Sputtering of a Composite Cermet ZnO:Ga–Zn Target: Part 2
| Autor: | A. E. Muslimov, V. M. Kanevsky, A. K. Akhmedov, A. Sh. Asvarov, A. Kh. Abduev |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Materials science Composite number chemistry.chemical_element 02 engineering and technology Zinc Cermet Conductivity Sputter deposition 021001 nanoscience & nanotechnology Microstructure 01 natural sciences Oxygen Surfaces Coatings and Films chemistry Chemical engineering 0103 physical sciences Thin film 0210 nano-technology |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 15:121-127 |
| ISSN: | 1819-7094 1027-4510 |
| DOI: | 10.1134/s1027451021010031 |
| Popis: | The influence of oxygen in the working gas on the deposition process, microstructure, and functional properties of transparent conductive ZnO:Ga layers obtained by the magnetron sputtering of a composite ZnO:Ga–Zn cermet target is investigated. It is shown that a relative excess of the zinc content in the reagent flux decreases with an increase in the oxygen content and the observed changes in the microstructure and the electrical and optical properties of the ZnO:Ga layers are due to a decrease in the oxygen deficit in them. The efficiency of using atomized cermet target material generally increases as the oxygen content in the working chamber increases. However, transparent conductive ZnO:Ga layers with a specific conductivity of σ > 103 Ohm–1 cm–1 acceptable for practical use were obtained at an oxygen content of less than 3%. |
| Databáze: | OpenAIRE |
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