Dedicated Process Architecture and the Characteristics of 1.4 ¿m Pixel CMOS Image Sensor with 8M Density

Autor: Chang-Rok Moon, Jong-Cheol Shin, Jinho Kim, Yun Ki Lee, Young-Joon Cho, Yu-Yeon Yu, Seong-Ho Hwang, Doo-Cheol Park, Byung Jun Park, Hwang-Yoon Kim, Seok-Ha Lee, Jongwan Jung, Seong-Ho Cho, Kangbok Lee, Kwangok Koh, Duckhyung Lee, Kinam Kim
Rok vydání: 2007
Předmět:
Zdroj: 2007 IEEE Symposium on VLSI Technology.
Popis: A 1.4 μm-pitch pixel of CMOS image sensor, which is the smallest to date, has been successfully developed and integrated into 8M density for the first time. To overcome the crucial degradation of the saturation charge and sensitivity, a novel photodiode structure extended under transfer gate and an elaborate optical design including very thin tungsten pixel routing with 65 nm-grade design rules are introduced, which result in enhanced electrical and optical performance.
Databáze: OpenAIRE