Growth and Electrical Properties of PbMg0.047Nb0.095Zr0.416Ti0.442O3 Films Fabricated by Metalorganic Decomposition
Autor: | Yusuke Daiko, Koichiro Honda, Mineharu Tsukada, Masaru Shimizu, Masafumi Kobune, Tetsuo Yazawa, Hironori Fujisawa, Atsushi Mineshige, Yuki Hasegawa, Hideshi Yamaguchi |
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Rok vydání: | 2009 |
Předmět: |
Ternary numeral system
Materials science Mechanical Engineering Dielectric Epitaxy Piezoelectricity Ferroelectricity law.invention Capacitor Mechanics of Materials Transmission electron microscopy law visual_art visual_art.visual_art_medium Electronic engineering General Materials Science Ceramic Composite material |
Zdroj: | Key Engineering Materials. :148-152 |
ISSN: | 1662-9795 |
DOI: | 10.4028/www.scientific.net/kem.421-422.148 |
Popis: | On the basis of experimental data on the piezoelectric pinpoint composition of ceramics of the ternary system Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 (PMNZT), which we investigated in our previous report, epitaxial PbMg0.047Nb0.095Zr0.416Ti0.442O3 thick films with thicknesses ranging from 0.4 to 1.9 m were fabricated on Pt(100)/MgO(100) substrates by metalorganic decomposition. The film- thickness dependence on the structural and electrical properties (dielectric, piezoelectric and ferroelectric properties) was investigated. All PMNZT films exhibited a highly uniform (001) orientation, regardless of the film thickness. The cross-sectional transmission electron microscope micrographs and all the physical data suggest that high-density PMNZT thick films with a thickness 1.0 m can be expected to function as highly electrically insulating capacitors with high potential for piezo- and ferroelectric applications. |
Databáze: | OpenAIRE |
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