| Autor: |
Eric Cassan, Daniel Pascal, Taha Benyattou, Delphine Marris-Morini, B. Han, Laurent Vivien, S. Laval, Sylvain Maine, Regis Orobtchouk, J-M. Fedeli, L. El Melhaoui |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
Journal of Lightwave Technology. 27:1387-1391 |
| ISSN: |
0733-8724 |
| DOI: |
10.1109/jlt.2008.923257 |
| Popis: |
The paper reports the design, fabrication and characterization of silicon-on-insulator (SOI) microring resonators using shallow etched rib waveguides. The variation of the Q-factor of microring resonators as a function of the ring diameter and coupling gap between the input waveguide and the ring is studied. Such structures are fabricated using e-beam lithography and reactive ion etching steps. Propagation loss of shallow etching rib waveguide has been evaluated to 0.8 dB/cm for wavelengths around 1550 nm. With a ring diameter of 100 mum and a coupling gap of 450 nm, the measured Q -factor is 35300. These results are matched by 3-D numerical optical modeling. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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