A biresonant plasma source based on a gapped linear microwave vibrator
| Autor: | S. I. Gritsinin, A. A. Chapkevich, A. M. Davydov, I. A. Kossyi, K. A. Arapov |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
Argon Physics and Astronomy (miscellaneous) business.industry chemistry.chemical_element Atmospheric-pressure plasma Plasma Condensed Matter Physics Ion source Optics Volume (thermodynamics) chemistry Physics::Plasma Physics Torr Electron temperature Atomic physics business Microwave |
| Zdroj: | Plasma Physics Reports. 37:263-272 |
| ISSN: | 1562-6938 1063-780X |
| Popis: | The operating principle of a novel microwave plasma source—a linear microwave vibrator with a gap—is discussed. The source is placed on a microwave-transparent window of a chamber filled with a plasma-forming gas (argon or methane). The device operation is based on the combination of two resonances—geometric and plasma ones. The results of experimental tests of the source are presented. For a microwave frequency of 2.45 GHz, microwave power of ≤1 kW, and plasma-forming gas pressure in the range 5 × 10−2–10−1 Torr, the source is capable of filling the reactor volume with a plasma having an electron density of about 1012 cm−3 and electron temperature of a few electronvolts. |
| Databáze: | OpenAIRE |
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